Cryogenic process chamber for the chip industry

With the cryogenic process chamber for for the chip industry - Precise temperatures and clean room capability.

The newly developed process chamber is made entirely of stainless steel and is therefore cleanroom-compatible. The automatic door enables efficient loading and unloading of the system. A connection to manufacturing execution systems (SECS/GEM) and overhead hoist transfer systems is provided. Batches are recognised via QR codes, which enables seamless integration into existing production processes.

Further application examples for heat treatment in the semiconductor industry can be found here: Oven systems for semiconductor production | Weiss Technik – vötschoven

Our highlights:

• Installation in clean room (outside and inside); class ISO 5
• -75°C achievable
• Connection to Manufacturing Execution System (SECS/GEM)
• Connection to Overhead Hoist Transfer System (automatic door)
• Batch recognition via QR code

Included in the standard configuration:

• Nitrogen purging to generate an inert atmosphere 
• Oxygen measuring device 
• Automatically opening door 
• Hepa filtering of the supply air 
• Constant negative pressure in the machine section to prevent particle emission